Using Photonic Effects in Optical Processing for Silicon Device Fabrication

    Research output: Contribution to conferencePaper

    Abstract

    Photonic effects can occur both in the bulk and at the interfaces of a multilayer semiconductor device. These effects can be used to activate some reactions at much lower temperatures as compared to the thermal effect alone, by illuminating the device with an appropriate optical spectrum. This paper briefly reviews some applications that we have developed for solar cell processing which can alsobe applied to microelectronic devices.
    Original languageAmerican English
    Pages17-20
    Number of pages4
    StatePublished - 1996
    EventSymposium Sponsored by the Thin Films and Interfaces Committee of the Electronic, Magnetic and Photonic Materials Division of TMS - Anaheim, California
    Duration: 4 Feb 19968 Feb 1996

    Conference

    ConferenceSymposium Sponsored by the Thin Films and Interfaces Committee of the Electronic, Magnetic and Photonic Materials Division of TMS
    CityAnaheim, California
    Period4/02/968/02/96

    NREL Publication Number

    • NREL/CP-520-24318

    Fingerprint

    Dive into the research topics of 'Using Photonic Effects in Optical Processing for Silicon Device Fabrication'. Together they form a unique fingerprint.

    Cite this