Abstract
Photonic effects can occur both in the bulk and at the interfaces of a multilayer semiconductor device. These effects can be used to activate some reactions at much lower temperatures as compared to the thermal effect alone, by illuminating the device with an appropriate optical spectrum. This paper briefly reviews some applications that we have developed for solar cell processing which can alsobe applied to microelectronic devices.
Original language | American English |
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Pages | 17-20 |
Number of pages | 4 |
State | Published - 1996 |
Event | Symposium Sponsored by the Thin Films and Interfaces Committee of the Electronic, Magnetic and Photonic Materials Division of TMS - Anaheim, California Duration: 4 Feb 1996 → 8 Feb 1996 |
Conference
Conference | Symposium Sponsored by the Thin Films and Interfaces Committee of the Electronic, Magnetic and Photonic Materials Division of TMS |
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City | Anaheim, California |
Period | 4/02/96 → 8/02/96 |
NREL Publication Number
- NREL/CP-520-24318