Wafer Characteristics via Reflectometry and Wafer Processing Apparatus and Method

NREL (Inventor)

Research output: Patent

Abstract

An exemplary system includes a measuring device to acquire non-contact thickness measurements of a wafer and a laser beam to cut the wafer at a rate based at least in part on one or more thicknesses measurements. An exemplary method includes illuminating a substrate with radiation, measuring at least some radiation reflected from the substrate, determining one or more cutting parameters based atleast in part on the measured radiation and cutting the substrate using the one or more cutting parameters. Various other exemplary methods, devices, systems, etc., are also disclosed.
Original languageAmerican English
Patent number7,238,912 B2
StatePublished - 2007

NREL Publication Number

  • NREL/PT-520-42142

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