Windowless Helium Lamp Assisted Chemical Vapor Deposition of Hydrogenated Amorphous Silicon

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)1314-1316
    Number of pages3
    JournalApplied Physics Letters
    Issue number14
    StatePublished - 1988

    Bibliographical note

    Work performed by Department of Electrical Engineering and Engineering Research Center, Colorado State University, Fort Collins, Colorado; Department of Electrical and Computer Engineering, University of Colorado, Boulder, Colorado; and Solar Energy Research Institute, Golden, Colorado

    NREL Publication Number

    • ACNR/JA-212-11377

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