@article{aebcc7da2d00481f8b183e466989d392,
title = "Windowless Helium Lamp Assisted Chemical Vapor Deposition of Hydrogenated Amorphous Silicon",
author = "NREL",
note = "Work performed by Department of Electrical Engineering and Engineering Research Center, Colorado State University, Fort Collins, Colorado; Department of Electrical and Computer Engineering, University of Colorado, Boulder, Colorado; and Solar Energy Research Institute, Golden, Colorado",
year = "1988",
doi = "10.1063/1.100007",
language = "American English",
volume = "53",
pages = "1314--1316",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "14",
}