Original language | American English |
---|---|
Pages (from-to) | 180-182 |
Number of pages | 3 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 11 |
Issue number | 1 |
DOIs | |
State | Published - 1993 |
NREL Publication Number
- NREL/JA-412-4721
Research output: Contribution to journal › Article
Original language | American English |
---|---|
Pages (from-to) | 180-182 |
Number of pages | 3 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 11 |
Issue number | 1 |
DOIs | |
State | Published - 1993 |