| Original language | American English |
|---|---|
| Pages (from-to) | 180-182 |
| Number of pages | 3 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 11 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1993 |
NLR Publication Number
- NREL/JA-412-4721
Research output: Contribution to journal › Article
| Original language | American English |
|---|---|
| Pages (from-to) | 180-182 |
| Number of pages | 3 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 11 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1993 |