@article{5c99cbb39f3d4f67adf22ede2f7e602c,
title = "X-ray Photoelectron Spectroscopy Investigation of Ion Beam Sputtered Indium Tin Oxide Films as a Function of Oxygen Pressure during Deposition",
author = "NREL",
note = "Work performed by Solar Energy Research Institute, Golden, Colorado, and Department of Electrical and Computer Engineering, Ben-Gurion University of the Negev, Beer-Sheva, Israel",
year = "1987",
doi = "10.1116/1.574109",
language = "American English",
volume = "5",
pages = "231--233",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "2",
}