Abstract
X-ray photoelectron spectroscopy (XPS) is used in both a qualitative and quantitative fashion to study the AlxGa1-xAs alloy. Gallium and aluminum atoms are always bonded to the arsenic atom. As the concentration of A1 increases, a notable shift in the As-3rf level could be expected as Ga and A1 both have different electronegativities. Spectra taken on molecular beam epitaxially grown samples do not show this shift in the As-3d core level. The composition of the films have been measured with an electron probe, and these results agree very well with the XPS quantitative data. Standard spectra are presented for films with x = 0.16, 0.23,0.32, 0.46, and 0.65.
Original language | American English |
---|---|
Pages (from-to) | 1129-1131 |
Number of pages | 3 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 2 |
Issue number | 2 |
DOIs | |
State | Published - Apr 1984 |
NREL Publication Number
- ACNR/JA-213-3534