X-Ray Photoemission Spectra for AlxGa1-xAs

P. J. Ireland, L. L. Kazmerski, R. F. Fisher

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X-ray photoelectron spectroscopy (XPS) is used in both a qualitative and quantitative fashion to study the AlxGa1-xAs alloy. Gallium and aluminum atoms are always bonded to the arsenic atom. As the concentration of A1 increases, a notable shift in the As-3rf level could be expected as Ga and A1 both have different electronegativities. Spectra taken on molecular beam epitaxially grown samples do not show this shift in the As-3d core level. The composition of the films have been measured with an electron probe, and these results agree very well with the XPS quantitative data. Standard spectra are presented for films with x = 0.16, 0.23,0.32, 0.46, and 0.65.

Original languageAmerican English
Pages (from-to)1129-1131
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number2
StatePublished - Apr 1984

NREL Publication Number

  • ACNR/JA-213-3534


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