Zero Added Oxygen for High Quality Sputtered ITO: A Data Science Investigation of Reduced Sn-Content and Added Zr: Article No. 021201

James Burst, Timothy Coutts, Timothy Gessert, Timothy Peshek

Research output: Contribution to journalArticlepeer-review

4 Scopus Citations
Original languageAmerican English
Number of pages10
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number2
StatePublished - 2016

NREL Publication Number

  • NREL/JA-5K00-65866


  • carrier density
  • electrical resistivity
  • high pressure
  • sputter deposition
  • thin films

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